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Place of Origin: | MADE IN CHINA |
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Brand Name: | ROYAL |
Certification: | ISO |
Model Number: | RTSP-PS |
Minimum Order Quantity: | 1 |
Price: | negotiable |
Packaging Details: | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
Delivery Time: | 2 weeks |
Payment Terms: | L/C, D/A, D/P, T/T |
Supply Ability: | 50 sets per month |
Applications: | Magnetron Sputtering Sources Balanced And Unbalanced Magnetron Sputtering Cathodes , Planar Sputtering Source | Deposition Materials: | Ti,Cr, Zr, Al, Cu, Ag, Au, ITO Etc. |
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Driving Model: | MF, DC, RF | ||
High Light: | coating machine parts,helium leak detector |
Magnetron Sputtering Sources Specifications
Key Features
1. Finite element magnetic field design
2. Magnet isolated from cooling water
3. Compatible with DC/MF and RF Powers
4. High target utilization
5. Adjustable ejecting direction
6. High power density and excellent uniformity
7. Balanced and unbalanced mode choice
Maximum Sputtering Power | |
Indirect Cooled target | > 20 Watts / cm2 (DC) |
> 7 Watts / cm2 (RF) | |
Discharge Voltage/ | 100 to 1500 volts |
Discharge Current | > 0.05 amps / cm2 |
Operating Pressure | 0.05 to 5 Pa |
Target utilization | > 35% |
Target | |
Form | Rectangular/ Planar |
Thickness | 6mm~16mm |
Width | 125mm |
Installation | Internal/external |
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions