RTDP22 oil diffusion pump is newest development pump for extremely high vacuum and large pumping speed.
Typical Applications:
The diffusion pump is used in vacuum coating system, optical coating machine, magnetron sputtering coating system, arc evaporation and thermal evaporation metallizing coaters; vacuum melting and drying system, also the vacuum furnace area for high temperature metallurgy.
Advantage:
1. Special designed cold trap unit and water - cooled device to guarantee low oil back- streaming rates into the vacuum chamber, avoid coating contamination.
2. Heating System: The heating cartridges are interior assemble, highly reduced the heating energy's lost, reducing the warming-up time.
3. Pump body material: Stainless Steel 304, highly improved the ultimate vacuum pressure data, reducing raw material's gasing - out in high vacuum pressure environment.
4. Cold trap: is with cooper material, U shape design, enhanced the frozing area.
5. Stable: working time up to 7200 hrs without stop;
6. Easy maintenance.
7. High Vacuum pumping speeds in the fine and high vacuum ranges, especially for optical and thermal evaporation coating system, keeping a stable vacuum range for base/working vacuum data.
RTDP22 oil diffusion pump technical data:
| Item | Performance and Description |
| Gas-In Flange size | 22〞 |
| Gas- out Flange size | 6〞 |
| Pumping Speed ( without cold trap) | 13000L/S |
| Pumping Speed ( with cold trap) | 6500L/S |
| Cooling Method | Recycle cooled water |
| Actual Pumping Speed (with coldtrap) | ＞6500L/S |
| Ultimate Pressure | 2.00E-05 Pa |
| Critical backpressure | 40 Pa |
| Full load critical back pressure | 30 Pa |
| Pump Fluid (Oils. Grease, Lubricants) | LionS/DC705 or High Vacuum Silicon Oil 275# |
| Oil Filling Consumption | 5 L |
| Pump oil suck-back flow rate mg/cm2.min | ＜E-5 mg/cm2.min |
| Power Environment | 3Phase 380V±5% 50HZ±0.2 |
| Heating Power | 7.8KW |
| Cooling Water Consumption(L/S) | 10 L/min |
| Heating up time (min) | 30 min |
| Pump body material | SUS304 |
| Weight |
275 kg |
Oil suck-back flow rate testing ( with cold-trap device installed )
RTDP22 oil diffusion pump layout
Please contact us for your applications, we are honored to serve you with our excellent service and quality.
