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Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

China Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine supplier
Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine supplier Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine supplier Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine supplier

Large Image :  Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

Product Details:

Place of Origin: Made in China
Brand Name: ROYAL
Certification: ISO, CE, UL standard
Model Number: RTAS950

Payment & Shipping Terms:

Minimum Order Quantity: 1 set
Price: negotiable
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 12 weeks
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 6 sets per month
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Detailed Product Description
Deposition Sources: Sputter + Ion Source PECVD Process Technique: PVD, Balanced/Unbalanced Magentron Sputtering Cathode
Applications: DLC, Hard Films, Optical Film Coating By Magnetron Sputtering

 

 

DLC hard coating machine / DLC PECVD coating equipment / Diamond like Carbon vacuum PVD coating system

 

DLC coatings: self-lubricating and anti-friction diamond-like coatings

Diamond-like-Carbon coatings are used in demanding automotive, non-ferrous material machining and industrial engineering environments where component surfaces are subjected to high contact pressure, intermittent lubrication or dry sliding and rolling environments where severe abrasive and adhesive wear conditions exist. DLC coatings are also commonly applied onto various medical and dental instruments and implants to provide a dark black, anti-reflective and bio-compatible surface with enhanced tribological protection properties.

This machine is suitable to the industrial production vacuum coating system. It equips a big size plain arc ion evaporation source and can deposite high performance hard metal film by arc evaporation technology, such as TiN, TiCN,AlTiN and all kinds of other special film according to customer’s requirements.
DLC coating (diamond-like carbon) is the combination of diamond (SP3) and graphite (SP2). The physical and chemical properties of DLC are intermediate to that of diamond and graphite


DLC coatings properties

  • Strong adhesion of the deposited films to the surface;
  • Hardness of the coating comparable to diamond hardness;
  • Durability;
  • Low coefficient of friction;
  • Chemical stability;
  • Ecological cleanliness;
  • Biological compatibility;
  • Transparency in the infra-red band of the spectrum;
  • High heat conductivity;
  • Corrosion resistance;
  • High electrical resistance

DLC coatings on sealing parts:

 

Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

 

Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

DLC Thin Film Coating Machine Specifications

 

MODEL RTSP800
TECHNOLOGY PECVD process- magnetron sputtering + ion source
CHAMBER MATERIAL Stainless Steel (S304)
CHAMBER SIZE Φ800*800mm (H)
CHAMBER TYPE Regular octahedron chamber, 2-doors
ROTATION RACK & JIG SYSTEM 6 (8)satellite, Max. weight: 400kgs
POWER SUPPLIES Qty. of Sputtering: 2*24 KW Bias of Power Supply: 1*24W AE power supply for option Ion Source Power supply 2 sets, AE power supply for option
DEPOSITION MATERIAL Cr/C
DEPOSITION SOURCE

2 pairs (4 pieces) Sputtering Cathodes + 2 Ion Source Coating Area: Dia800mm*H550mm;

Uniformity Area: ±10~15%

CONTROL PLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEM Rotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001 - 1 set (Leybold)
Holding Pump: D60C-1set- (Leybold)
Magnetric Rotor Suspension Molecular Pump: MAG2200 - 2 sets (Leybold)
GAS MASS FLOW CONTROLLER 3 channels, Made in America (MKS brand)
VACUUM GAUGE Model: ZDF-X-LE, Made in China
Linear Ion Source 2 pieces Pre-treating, plasma cleaning + assisted deposition
SAFETY SYSTEM Numerous safety interlocks to protect operators and equipment
HEATING Heaters: 20KW. Max. temp.: 400℃
COOLING Industrial Chiller (Cold Water)
POWER MAX. 100KW (Approx.)
AVERAGE POWER CONSUMPTION 45 KW (Approx.)
GROSS WEIGHT T (Approx.)
FOOT PRINT ( L*W*H) 4000*4000 *4000 MM
POWER ELECTRICAL AC 380V/3 phases/50HZ

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Contact Details
SHANGHAI ROYAL TECHENOLOGY INC.

Contact Person: Ms. Zhou

Tel: +8615316373076

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