Anode Layer Plasma Sources
High Lights | Applications: |
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R2R web coaters, In-line deposition systems, Batch coaters For optical films, hard coatings, functional and decorative thin films, textiles plasma treatment. |
Product | ActiveGas-ALS (rectangular) | ActiveGas-ALS (circular) |
Max. discharge voltage | 1500V | 1500V |
Max. discharge current | >15mA/cm | >15mA/cm |
Ion energy | 50~800eV | 50~800eV |
Operating pressure | 5×10-2 ~1 Pa | 5×10-2 ~1 Pa |
Cooling water | 5L/min | 2L/min |
Dimensions (mm) | 145W@L<390 / 160W@L>400 | ø114×130(H) |
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions