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High Vacuum Oil Diffusion Pumps

High Vacuum Oil Diffusion Pumps
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Name: Oil Diffusion Vacuum Pumps
Application: Vacuum Coating System,
Feature: Easy Maintenance
Advantage: High Vacuum Pumping Speeds
Factory Location: Shanghai City, China
Factory Location: Shanghai City, China
Factory Location: Shanghai City, China
Factory Location: Shanghai City, China
Worldwide Service: Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service: Machine Operation, Maintenance, Coating Process Recipes, Program
Warranty: Limited Warranty 1 Year For Free, Whole Life For Machine
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
High Light:

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Basic Infomation
Place of Origin: MADE IN CHINA
Brand Name: ROYAL
Certification: ISO
Model Number: RTDP28
Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 1 week
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 200 SETS/MONTH
Product Description



RTDP28 oil diffusion pump is newest development pump for extremely high vacuum and large pumping speed.




Typical Applications:


The diffusion pump is used in vacuum coating system, optical coating machine, magnetron sputtering coating system, arc evaporation and thermal evaporation metallizing coaters; roll to roll vacuum coating system, vacuum melting and drying system, also the vacuum furnace area for high temperature metallurgy.




1. Special designed cold trap unit and water - cooled device to guarantee low oil back- streaming rates into the vacuum chamber, avoid coating contamination.

2. Heating System: The heating cartridges are interior assemble, highly reduced the heating energy's lost, reducing the warming-up time.

3. Pump body material: Stainless Steel 304, highly improved the ultimate vacuum pressure data, reducing raw material's gasing - out in high vacuum pressure environment.

4. Cold trap: is with cooper material, U shape design, enhanced the frozing area.

5. Stable: working time up to 7200 hrs without stop;

6. Easy maintenance.

7. High Vacuum pumping speeds in the fine and high vacuum ranges, especially for optical and thermal evaporation coating system, keeping a stable vacuum range for base/working vacuum data.



RTDP28 oil diffusion pump technical data:


Item Performance and Description
High Vacuum Connecting Flange VG720
Fore vacuum connecting flange VG150
Pumping Speed ( without cold trap) >22000L/S
Pumping Speed ( with cold trap) 00L/S
Cooling Method Recycle cooled water
Actual Pumping Speed (with coldtrap) 11000L/S
Ultimate Pressure 2.00E-05 Pa
Critical backpressure 40 Pa
Full load critical back pressure 30 Pa
Pump Fluid (Oils. Grease, Lubricants) LionS/DC705 or High Vacuum Silicon Oil 275#
Oil Filling Consumption 10L
Pump oil suck-back flow rate mg/cm2.min E-5 mg/cm2.min
Power Environment 3Phase 380V±5% 50HZ±0.2
Heating Power 12 KW
Cooling Water Consumption(L/S) 10 L/min
Heating up time (min) 50 min
Pump body material SUS304


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High Vacuum Oil Diffusion Pumps 1



High Vacuum Oil Diffusion Pumps 2

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RTDP28 pumping speed ( with coldtrap)

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RTDP28 pumping speed (without coldtrap)

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RTDP28 oil diffusion pump layout dimensions

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Please contact us for your applications, we are honored to serve you with our excellent service and quality. 

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