RTDP28 oil diffusion pump is newest development pump for extremely high vacuum and large pumping speed.
The diffusion pump is used in vacuum coating system, optical coating machine, magnetron sputtering coating system, arc evaporation and thermal evaporation metallizing coaters; roll to roll vacuum coating system, vacuum melting and drying system, also the vacuum furnace area for high temperature metallurgy.
1. Special designed cold trap unit and water - cooled device to guarantee low oil back- streaming rates into the vacuum chamber, avoid coating contamination.
2. Heating System: The heating cartridges are interior assemble, highly reduced the heating energy's lost, reducing the warming-up time.
3. Pump body material: Stainless Steel 304, highly improved the ultimate vacuum pressure data, reducing raw material's gasing - out in high vacuum pressure environment.
4. Cold trap: is with cooper material, U shape design, enhanced the frozing area.
5. Stable: working time up to 7200 hrs without stop;
6. Easy maintenance.
7. High Vacuum pumping speeds in the fine and high vacuum ranges, especially for optical and thermal evaporation coating system, keeping a stable vacuum range for base/working vacuum data.
RTDP28 oil diffusion pump technical data:
|Item||Performance and Description|
|High Vacuum Connecting Flange||VG720|
|Fore vacuum connecting flange||VG150|
|Pumping Speed ( without cold trap)||＞22000L/S|
|Pumping Speed ( with cold trap)||00L/S|
|Cooling Method||Recycle cooled water|
|Actual Pumping Speed (with coldtrap)||＞11000L/S|
|Ultimate Pressure||2.00E-05 Pa|
|Critical backpressure||40 Pa|
|Full load critical back pressure||30 Pa|
|Pump Fluid (Oils. Grease, Lubricants)||LionS/DC705 or High Vacuum Silicon Oil 275#|
|Oil Filling Consumption||10L|
|Pump oil suck-back flow rate mg/cm2.min||＜E-5 mg/cm2.min|
|Power Environment||3Phase 380V±5% 50HZ±0.2|
|Heating Power||12 KW|
|Cooling Water Consumption(L/S)||10 L/min|
|Heating up time (min)||50 min|
|Pump body material||SUS304|
RTDP28 pumping speed ( with coldtrap)
RTDP28 pumping speed (without coldtrap)
RTDP28 oil diffusion pump layout dimensions
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