Automotive, Semiconductor, SiC Coating, DLC Film Deposition,
Range From 100 Nm To 12μm, Thickness Tolerance ±5%
silver plating machine
ion plating system
Hydrophobic composition film and other functional films Sputtering Deposition System
The RTSP1213 machine is a batch model sputtering system, can deposits various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonics products, aerospace and other new energy industries.
To improve the conductivity of surface;
High corrosion resistance;
High wear resistance;
Hydrophobic composition film and other functional films
Available for compound coatings: metallic and non-metallic films.
Film thickness range from 100nm to 12μm, thickness tolerance ±5%
Low tempering parts surface hardening treatment.
Vertical orientation, polyhedron structure, 2-doors (front and back )
Environmentally friendly system, no industrial waste water, air and noise pollution;
Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
Up to 10 processing recipes login and backup; high repeatability and diversity.
Special design of Carousel system for high uniformity of film deposition.
High productivity and high quality
Stable and reliable system, running 365 days * 24hrs ( maintenance and repair breaking time)
Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known Europe brand pumps
Compact design occupy minimum installation space.
1. Ultimate Vacuum Pressure: better than 8.0*10-5 Pa;
Base Vacuum pressure: 3.0*10-4 Pa
3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)