Roll to Roll Web Thermal Evaporation and Sputtering Coating Machine
A. One chamber divided into multi-pressure zones to accommodate various deposition sources.
B. Multi-Source simultaneous deposition capabilities in one web pass, for multi-layer coating.
C. Reversible web winding direction enables deposition of unlimited layers without breaking vacuum.
D. Precision web handling mechanisms with edge-guide to allow multiple passes without loss of alignment. (Optional)
E. AC Invert web drive system for accurate control of multiple web speeds.
F. In-line optical and/or resistance thickness monitoring systems, to control precise deposition thickness and uniformity. (Optional)
G. Chamber is constructed of SUS304L Stainless with low out gassing components to insure deeper vacuum.
H. Vacuum pumping by a combination of turbo-molecular pump and low temperature cryogenics, to provide clean vacuum without moisture or oil contamination.
|Maximum Roll Diameter||600mm||600mm||600mm|
|Maximum Web Speed||1000fpm||1000fpm||1000fpm|
|Minimum Web Speed||100fpm||100fpm||100fpm|
|Number of Boats||6||10|
|Average Power Consumption||100KW||130KW||140KW|
|Average Water Consumption||36gpm||45gpm||53gpm|
Features: with multiple deposition sources, available for oxide conducting film, metal conducting film, optical film, dielectric film.
Substrates: PET,PEN, PES, PI, PC, PA films
Applications: electronic paper, flexible circuits, photovoltaic, medical strips, RFID (Radio Frequency Identification) and Low-E film.
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.