Laboratory DC and RF Sputtering Coating Machine, DC/MF Sputtering Lab.Coating Unit, R&D Lab. Sputtering System
1 set
MOQ
negotiable
Price
Laboratory DC and  RF Sputtering Coating Machine,  DC/MF Sputtering Lab.Coating Unit, R&D Lab. Sputtering System
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Features
Basic Infomation
Place of Origin: MADE IN CHINA
Brand Name: ROYAL
Certification: CE certification
Model Number: RTSP-400
High Light:

magnetron sputtering equipment

,

vacuum deposition equipment

Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 8 weeks
Payment Terms: L/C, T/T
Supply Ability: 10 sets per month
Specifications
Chamber: Horizontal Orientation
Sputtering Sources: MF, DC And RF
Sputtering Cathode: Circular Planar Type
Sputtering Target: Al2O3, TiO, ITO, Cr, Zr, Au Gold
Product Description

                                       Laboratory  Magnetron Sputtering Vacuum Coating System 

 

 

1. The UHV sputtering system is equipped with

  • DC sputtering guns to deposit the semi-conductive and non-conductive materials ( Si, SiO2, Al2O3, Si3N4 ,Cr2O3,ITO and other materials).
  • RF sputtering gun to deposit the conductive material Aluminum, Silver, Gold etc.
  • DC and RF power supply sources can be exchanged flexible.

 

2. The UHV sputtering system applications of

  • Conductive coatings on polymeric materials, wood, fabrics at low temperatures less than 100 ℃

         Application of conductive coatings on glass, ceramics and other dielectric materials.

 

Laboratory DC and  RF Sputtering Coating Machine,  DC/MF Sputtering Lab.Coating Unit, R&D Lab. Sputtering System 0

 

3. Technical Performance:

 

3. 1 Ultimate Vacuum Pressure: better than 5.0×10-6 Torr.

3. 2. Operating Vacuum Pressure: 1.0×10-4 Torr.

3. 3. Pumpingdown Time: from 1 atm to 1.0×10-4 Torr≤ 3 minutes ( room temperature, dry, clean and empty chamber)

3. 4. Metalizing material (sputtering ) Al, Cr, Sn, Ti, SS, Cu… etc.

3. 5. Operating Model: Full Automatically /Semi-Auto/ Manually

 

4.​ Structure

The UHV Sputtering vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber

2. Rouhging Vacuum Pumping System (Backing Pump Package)

3. High Vacuum Pumping System (Diffusion Pump)

4. Electrical Control and Operation System

5. Auxiliarry Facility System (Sub System)

6. Deposition System

 

 

For more specifications, please contact us. Customized inquiries are welcomed. 

 

 

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Contact Person : Ms. ZHOU XIN
Fax : 86-21-67740022
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