ITO Glass in Touch Panel, ITO Thin Film Coating Equipment, Ag, SiO Layer Coating, ITO High Transmission Coater
ITO Glass PVD Sputtering Coating Plant Standard applications: PET, high quality glass substrate. Like eletronic display, ITO coated microscope slide, Transparent shielding glass, conducting glass, defrosting film, De-icing film coating,
ITO Glass PVD Sputtering Coating Plant Technical Configurations:
1) DC Sputtering Sources: Cu, Al, ITO
2) MF Sputtering Sources
3) Turbo Molecular pump + Backing Pump group
4) High-intensity magnetic field to improve ITO film quality, target utilization rate >30%
5) Cu, Al, Si targets utilization rate > 35%
6) Deposition Rate: 30nm m/min ~ 40nm m/min
7) Sputtering Uniformity Area: 350mm
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.