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SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

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SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

China SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier
SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier

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Product Details:

Place of Origin: Made in China
Brand Name: ROYAL
Certification: ISO, CE, UL standard
Model Number: RTSP1213-DC

Payment & Shipping Terms:

Minimum Order Quantity: 1 set
Price: negotiable
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 16 weeks
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 6 sets per month
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Detailed Product Description
Chamber: Vertical Orientation, 1-door Material: Stainless Steel 304/316
Deposition Sources: DC / MF Sputtering Cathodes Technique: PVD, Balanced / Unbalanced Magentron Sputtering Cathode
Applications: Automotive, Semiconductor, SiC Coating, DLC Film Deposition, Film Features: Wear Resistance, Strong Adhesion, Decorative Coating Colors

 

 

SiC Fuel Cell Module PECVD Sputtering System / Hydrogen Fuel Cell Magnetron Sputtering Coating Equipment

 

 

SiC Fuel Cell Module Sputtering System Specifications

 

MODEL RTSP1213-DC  
MATERIAL Stainless Steel (S304)
 
CHAMBER SIZE Φ1250 * 1350mm (H)
CHAMBER TYPE Front and back 2 - doors structure, Vertical
SINGLE PUMP PACKAGE Rotary Piston Vacuum Pump
Roots Vacuum Pump
Magnetic Suspension Molecular Pump
Rotary Vane Pump (Holding Pump)
TECHNOLOGY Magnetron Sputtering, Ion Source PECVD
POWER SUPPLY Sputtering power supply + Bias Power supply + Ion Source
DEPOSITION SOURCE 2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
CONTROL PLC+Touch Screen
GAS Gas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
SAFETY SYSTEM Numerous safety interlocks to protect operators and equipment
COOLING Cooling Water
CLEANING Glow Discharge/Ion Source
POWER MAX. 150KW
AVERAGE POWER CONSUMPTION 75KW
 

 

 

The SiC Fuel Cell Module Sputtering System is exclusively designed and developed for FCV vechiles application. FCV is the short name of Fuel Cell Vehicle, it is the newest technology for next generation of green cars. It can generate electrical energy continuously by electrochemical reaction between oxygen and hydrogen. It is different from the primary battery such as dry cell and rechargeable battery that needs to repeat charging.

The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

 

Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.

The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.

The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.

 SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering EquipmentSiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

 

 

 

 

SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions. 

Contact Details
SHANGHAI ROYAL TECHENOLOGY INC.

Contact Person: Ms. Zhou

Tel: +8615316373076

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