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High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

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High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

China High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible supplier
High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible supplier High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible supplier High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible supplier High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible supplier

Large Image :  High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

Product Details:

Place of Origin: Made in China
Brand Name: ROYAL
Certification: ISO, CE, UL standard
Model Number: RTEP-0913

Payment & Shipping Terms:

Minimum Order Quantity: 1 set
Price: negotiable
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 12 weeks
Payment Terms: L/C, T/T, D/A, D/P
Supply Ability: 10 sets per month
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Detailed Product Description
Applications: Medical X-ray Screen, Dental Imaging, Security Inspection, High - Energy Physics Vacuum Metallizer Key Words: High Resolution, CsI: T1; Thin Scintillator Films; X-ray Imaging; Vacuum Deposition Method, Carbon Layer Post-deposition
Equipment Size: Dia950 *H1300MM Material: SUS304L

High Performance Vacuum Metal Deposition Equipment, CsI vacuum metallizer by Thermal Crucible

 

 

Keywords: high resolution, CsI: T1; thin scintillator films; X-ray imaging; vacuum deposition method, carbon layer post-deposition

 
 

CsI thin film deposition for X-ray Imaging devices is an advanced technique to evaporate CsI on the screen to give a high quality of imaging. With its high resolution performance, also widely used in security checking and inspection, high energy physics subjects , physics of nuclear energy areas etc.

The RTEP0913 thermal evaporation coating system was developed for CsI film deposition on X-ray imaging in high vacuum pressure environment. The CsI T1 scintillators ranging from 2 μm to 14 μm in thickness. The carbon layer film can be considered as post-deposition to improve high resolutions.

 

Cesium Iodide (CsI T1) Vacuum Deposition performance and characterizations

  • Ultra- High Spatial Resolution of Imaging;
  • Fast response for sharper imaging;
  • Class leading edge-to-edge image areas;
  • Optical absorb layers or reflector layers;
  • Low patient X-ray dose;
  • Suitable for CCD and CMOS devices, especially in medical industries.

 

Type:

Vertical orientation, Cylinder, 1-door, front opening.

 

 

Design Features:

 Ultra-high ultimate vacuum pressure : up to 9.0*10-5 Pa;

 Fast heating up devices for a good adhesion;

 Proper high vacuum pump selection and pumping system to avoid hazard material's  exposed in the air;

 Robust, compact and solid coating system;

 High stability, working 960 hrs without stop.

 Inficon Film Thickness Controller device to monitor the film thickness inline.

 Exclusively crucibles design and selection for CsI deposition.

 Substrates coating, max. size: 500*500mm

 Advanced rack design concepts can load 2 pieces substrates per batch, highly enhance the production output.

 

Technical Specifications:

 

Performance

1. Ultimate Vacuum Pressure:  better than 9.0*10-5 Pa;

2. Operating Vacuum Pressure: 6.0*10-4 Pa ~9.0*10-4 Pa; 

Base Vacuum pressure: 3.0*10-4 Pa

3. Pumping down Time:  from 1 atm to 2.0×10-3 Pa25 minutes  ( room temperature, dry, clean and empty chamber)   

4. Deposition source: quartz crucible thermal evaporation

5. Operating Model:  Full Automatically /Semi-Auto/ Manually 

6. Heating: from room temperature up to max. 1000℃,
TFT glass substrate heating up time: from 0~250℃<40mins;

7. CsI deposition rate:  0~100nm/sec

8. CsI: T1 film thickness: up to 600μm

 

 

Structure

The vacuum coating machine contains key completed system listed below:

 

1. Vacuum Chamber
1.1 Size:  Inner Diameter 900mm

         Inner Height: 1300mm

1.2 Material:  Vacuum Chamber  SUS304

            Door and flanges SUS304

       Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

 Chamber chassis  SS41 mild steel with painted finishing surface treatment.

1.3 Evaporation Shield :  SUS304

1.4 View Window: on chamber door

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door:  SUS304 material

 

 

2. Roughing Vacuum Pumping System:
 Oil rotary vane vacuum  pump + roots pump ( Germany Pfeiffer )


 

 

3. High Vacuum Pumping System:  

Magnetic Suspension Molecular Pump  ( Germany Pfeiffer )

 

4. Electrical Control and Operation System- PLC+ Touch Screen

4.1  Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2  Evaporation Power

4.3  Evaporation Control System

4.4  Operation System:  Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5  Measuring System

     Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge

     Temperature measuring device: Thermocouple

     Film thickness controller: Inficon brand, SQC-310   
 

4.6 Alarm System:  Compressed air pressure , Cooling water flow, Mis-operation 

4.7 Power Load Indicator:  Voltage indicator and load current indicator

 

 

 

 

5. Deposition System

5.1 Deposition source:  quartz crucible

5.2 Deposition material: CsI, Carbon

 

 

6.  Sub-System

6.1  Air Compressed Valve Control System

6.2  Cooling Water System:Water flow pipe and switch valve system

 

 Working Environment

Compressed Air:  5~8kg/cm2

Cooling  Water:  Water-In Temperature:  20~25℃, 200 Liter/min,
           Water-In Pressure: 2~3 kg/cm2,

                                         

Power: 3 Phase  380V 50Hz(60Hz), 65kVA,  average power consumption: 30KW 

Installation Area:  (L*W*H) 3000*200*2300mm

Exhaust: Vent for mechanical pumps

 

 

Evaporation power 

 

 

High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

 

 

 

 

 

 

Electrical Enclosure Module

 

High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

 

Contact Details
SHANGHAI ROYAL TECHENOLOGY INC.

Contact Person: Ms. Zhou

Tel: +8615316373076

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