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High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

1 set
High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible
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Applications: Medical X-ray Screen, Dental Imaging, Security Inspection, High - Energy Physics
Vacuum Metallizer Key Words: High Resolution, CsI: T1; Thin Scintillator Films; X-ray Imaging; Vacuum Deposition Method, Carbon Layer Post-deposition
Properties: High Resolution, CsI: T1; Thin Scintillator Films; X-ray Imaging; Vacuum Deposition Method, Carbon Layer Post-deposition
Factory Location: Shanghai City, China
Factory Location: Shanghai City, China
Worldwide Service: Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service: Machine Operation, Maintenance, Coating Process Recipes, Program
Warranty: Limited Warranty 1 Year For Free, Whole Life For Machine
Warranty: Limited Warranty 1 Year For Free, Whole Life For Machine
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
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Basic Infomation
Place of Origin: Made in China
Brand Name: ROYAL
Certification: ISO, CE, UL standard
Model Number: RTEP-0913
Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 12 weeks
Payment Terms: L/C, T/T, D/A, D/P
Supply Ability: 10 sets per month
Product Description

High Performance Vacuum Metal Deposition Equipment, CsI vacuum metallizer by Thermal Crucible



Keywords: high resolution, CsI: T1; thin scintillator films; X-ray imaging; vacuum deposition method, carbon layer post-deposition


CsI thin film deposition for X-ray Imaging devices is an advanced technique to evaporate CsI on the screen to give a high quality of imaging. With its high resolution performance, also widely used in security checking and inspection, high energy physics subjects , physics of nuclear energy areas etc.

The RTEP0913 thermal evaporation coating system was developed for CsI film deposition on X-ray imaging in high vacuum pressure environment. The CsI T1 scintillators ranging from 2 μm to 14 μm in thickness. The carbon layer film can be considered as post-deposition to improve high resolutions.


Cesium Iodide (CsI T1) Vacuum Deposition performance and characterizations

  • Ultra- High Spatial Resolution of Imaging;
  • Fast response for sharper imaging;
  • Class leading edge-to-edge image areas;
  • Optical absorb layers or reflector layers;
  • Low patient X-ray dose;
  • Suitable for CCD and CMOS devices, especially in medical industries.



Vertical orientation, Cylinder, 1-door, front opening.



Design Features:

 Ultra-high ultimate vacuum pressure : up to 9.0*10-5 Pa;

 Fast heating up devices for a good adhesion;

 Proper high vacuum pump selection and pumping system to avoid hazard material's  exposed in the air;

 Robust, compact and solid coating system;

 High stability, working 960 hrs without stop.

 Inficon Film Thickness Controller device to monitor the film thickness inline.

 Exclusively crucibles design and selection for CsI deposition.

 Substrates coating, max. size: 500*500mm

 Advanced rack design concepts can load 2 pieces substrates per batch, highly enhance the production output.


Technical Specifications:



1. Ultimate Vacuum Pressure:  better than 9.0*10-5 Pa;

2. Operating Vacuum Pressure: 6.0*10-4 Pa ~9.0*10-4 Pa; 

Base Vacuum pressure: 3.0*10-4 Pa

3. Pumping down Time:  from 1 atm to 2.0×10-3 Pa25 minutes  ( room temperature, dry, clean and empty chamber)   

4. Deposition source: quartz crucible thermal evaporation

5. Operating Model:  Full Automatically /Semi-Auto/ Manually 

6. Heating: from room temperature up to max. 1000℃,
TFT glass substrate heating up time: from 0~250℃<40mins;

7. CsI deposition rate:  0~100nm/sec

8. CsI: T1 film thickness: up to 600μm




The vacuum coating machine contains key completed system listed below:


1. Vacuum Chamber
1.1 Size:  Inner Diameter 900mm

         Inner Height: 1300mm

1.2 Material:  Vacuum Chamber  SUS304

            Door and flanges SUS304

       Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

 Chamber chassis  SS41 mild steel with painted finishing surface treatment.

1.3 Evaporation Shield :  SUS304

1.4 View Window: on chamber door

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door:  SUS304 material



2. Roughing Vacuum Pumping System:
 Oil rotary vane vacuum  pump + roots pump ( Germany Pfeiffer )



3. High Vacuum Pumping System:  

Magnetic Suspension Molecular Pump  ( Germany Pfeiffer )


4. Electrical Control and Operation System- PLC+ Touch Screen

4.1  Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2  Evaporation Power

4.3  Evaporation Control System

4.4  Operation System:  Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5  Measuring System

     Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge

     Temperature measuring device: Thermocouple

     Film thickness controller: Inficon brand, SQC-310   

4.6 Alarm System:  Compressed air pressure , Cooling water flow, Mis-operation 

4.7 Power Load Indicator:  Voltage indicator and load current indicator





5. Deposition System

5.1 Deposition source:  quartz crucible

5.2 Deposition material: CsI, Carbon



6.  Sub-System

6.1  Air Compressed Valve Control System

6.2  Cooling Water System:Water flow pipe and switch valve system


 Working Environment

Compressed Air:  5~8kg/cm2

Cooling  Water:  Water-In Temperature:  20~25℃, 200 Liter/min,
           Water-In Pressure: 2~3 kg/cm2,


Power: 3 Phase  380V 50Hz(60Hz), 65kVA,  average power consumption: 30KW 

Installation Area:  (L*W*H) 3000*200*2300mm

Exhaust: Vent for mechanical pumps






Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.


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