Au Gold Sputtering Deposition Equipment, Silve/Gold PVD Deposition Machine, Conductive Film PVD Sputtering System
Summary: The DPC process- Direct Plating Copper is an advanced coating technology applied with LED / semiconductor / electronic industries. One typical application is Ceramic Radiating Substrate. Cooper conductive film deposition on Aluminum Oxide (Al2O3), AlN substrates by PVD vacuum sputtering technology, compared with traditional manufacturing
methods: DBC LTCC HTCC, much lower production cost is its high feature.
Royal technology team assisted our customer to developed the DPC process successfully with PVD sputtering technology.
Keywords: Ceramic sealing parts, DPC process, Copper PVD Sputtering system, LED Ceramic Chips With Cooper Plating, Al2O3, AlN Ceramic Circuit Boards, Al2O3 Plates On LED, Semiconductor
Applications of DPC:
· HBLED
· Substrates for solar concentrator cells
· Power semiconductor packaging including automotive motor control
· Hybrid and electric automobile power management electronics
· Packages for RF
· Microwave devices
DPC Technology Performance
Various substrate materials: Ceramic (Al3O2, AlN), Glass, and Si
Features:
Technical Specifications
1. Ultimate Vacuum Pressure: better than 9.0*10-5 Pa;
3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)
4. Deposition source: Gencoa magnetron sputtering cathodes, steered arc cathodes, Ion source
5. Operating Model: Full Automatically /Semi-Auto/ Manually
6. Heating: from room temperature up to max. 500℃,
9. Ion source for PECVD and PA PVD process.
The vacuum coating machine contains key completed system listed below:
1. Vacuum Chamber
1.1 Size: Inner Diameter: 1200mm
Inner Height: 1500mm
1.2 Material: Vacuum Chamber SUS304
Door and flanges SUS304
Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.
Chamber chassis SS41 mild steel with painted finishing surface treatment.
1.3 Chamber Shield : SUS304
1.4 View Window: 2 on door
1.5 Vacuum Chamber Venting Valve (including silencer)
1.6 Door: SUS304 material
2. Roughing Vacuum Pumping System:
Oil rotary vane vacuum pump + Holding Pump
3. High Vacuum Pumping System: Magnetically Suspension Molecular Pump - 2 sets
4. Electrical Control and Operation System- PLC+ Touch Screen Operation System:
Suppliers:
PLC: Mitsubishi + Touch Screen (Made in China)
Electronic Components: SCHNEIDER,OMRON.
Safety Protecting System: Numerous safety interlocks to protect operators and equipment ( water, current gas, temperature etc.)
Coating Processes System: Process Automation & Control.
4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type
4.2 Power Supply: DC/MF sputtering power + DC Arc power + Bias Power Supply
4.3 Deposition control system
4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating
4.5 Measuring System
Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand
Temperature measuring device: Thermo-couple
MFC: Mass Flow Controller ( 4 ways ),
4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation
4.7 Power Load Indicator: Voltage indicator and load current indicator
5. Deposition System
5.1 Deposition source: Sputtering cathodes+ Arc sources + Ion Source
5.2 Deposition material: Copper, Aluminum, Chrome, Silver, Gold, SS, Titanium etc.
6. Sub-System
6.1 Air Compressed Valve Control System
6.2 Cooling Water System:Water flow pipe and switch valve system
7. Working Environment
Compressed Air: 5~8kg/cm2
Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,
Power: 3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW
Installation Area: (L*W*H)4400*3200*2950mm
Exhaust: Vent for mechanical pumps
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
