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Copper Thin Film Coating Machine , Au Conductive Magnetron Sputtering Unit

1 set
MOQ
negotiable
Price
Copper Thin Film Coating Machine , Au Conductive Magnetron Sputtering Unit
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Features
Specifications
Chamber: Vertical Orientation, 1-DOOR
Material: Stainless Steel 304/316
Film Features: High Reflective, Excellent Corrosion And Wear Resistance
Name: Copper Thin Film Coating Machine
Technology: Magnetron Sputtering
Structure: Vertical Double Door
Factory Location: Shanghai City, China
Factory Location: Shanghai City, China
Worldwide Service: Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Worldwide Service: Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service: Machine Operation, Maintenance, Coating Process Recipes, Program
Warranty: Limited Warranty 1 Year For Free, Whole Life For Machine
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
OEM & ODM: Available, We Support Tailor Made Design And Fabrication
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thin film deposition equipment

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dlc coating equipment

Basic Infomation
Place of Origin: Made in China
Brand Name: ROYAL
Certification: CE
Model Number: RTAS950
Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 8 to 12 weeks
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 10 sets per month
Product Description

 

Copper Thin Film Coating Machine , Au Conductive Thin Film Sputtering Deposition Plant, Silver Sputtering Coating System

 

 

 

Copper  Magnetron Sputtering Vacuum Coater

 

1) Film thickness controllability and well repeatability,can be a reliable system of pre-plated thickness of the films and sputtering in a larger surface of uniform film;

2) The adhesion of the film and the substrate is very well. Some of the high energy of sputtered atoms to produce different levels of injection phenomenon, pseudo-diffusion layer formed on the substrate layer of sputtered atoms and substrate atoms fused with each other;

3) Preparation of special material of the film, you can use different materials and sputtering hybrid film, compound film,also can be sputtered into the TiN imitation gold film.

 

Copper Magnetron Sputtering Vacuum Coater Specifications

 

Magnetron Sputtering Coating Machine
Performance  RTSP-700 RTSP-900 RTSP-1000 RTSP-1250 RTSP-1400 RTSP -1600
Size of coating chamber 700*H900mm 900*H1100mm 1000*H1200mm 1250*H1350mm 1400*H1600mm 1600*H1800mm
Power supply type Filament power supply, pulse bias power supply, DC magnetron power supply, intermediate frequency magnetron power supply, radio frequency magnetron power supply, linear ionization source
Structure of vacuum chamber Vertical double door, vertical front door structure, rear air exhaust system
Material of vacuum chamber High-quality stainless steel cavity
Limit vacuum 6.0*10-4Pa
Pump-down time (no-load) Pump the atmosphere to 8.0*10-3>Pa ≤15 minutes
Vacuum acquisition system Diffusion pump or molecular pump + Roots pump + Mechanical pump + rotary vane pump (the specific model can be configured according to customer requirements)
Coating mode Magnetron sputtering coating
Film type Metal film, reactive film, compound film, multilayer film and semiconductor film
Magnetron target type Rectangular magnetron target, cylindrical magnetron target and twin magnetron targets
Magnetron supply power and number of magnetron targets Select according to different coating process and customer requirements
Bias power supply 10KW/1 unit 20KW/1 unit 20KW/1 unit 30KW/1 unit 40KW/1 unit 50KW/1unit
Rotating mode of workpiece turntable Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable)
Process gas 3-path or 4-path process gas flow control and display system, selective automatic gassing system
Cooling mode Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)
Control mode Manual/automatic integration mode, touch screen operation, PLC or computer control
Total power 30KW 35KW 40KW 50KW 65KW 80KW
Alarm and protection Alarm water shortage, overcurrent and over-voltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function
Equipment area W2m*L3m W2.5m*L3.5m W3m*L4m W4m*L5m W4.5m*L6m W5m*L7m
Other technical parameters Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure: 0.5-0.8MPa
Remarks The specific configuration of coating equipment can be designed according to process requirements of coating products

 

 

 

Copper Thin Film Coating Machine , Au Conductive Magnetron Sputtering Unit 0

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

 

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