Ceramic PVD Coating Equipment Features:
1. Vacuum chamber is vertical one open door , 304 stainless steel manufactures, vacuum chamber internal diameter from φ1400mm-Φ2000mm;
2. Vacuum system by Rotary vane pump, Roots pump and Oil Diffusion Pumps or Molecular Pump Constitution;
3. Coating system uses 1-2 intermediate frequency magnetism to control the sputtering power source, has 1-2 pair of non-balanced magnetism to control the target, and has 14-40 arc sources.
4. High efficiency pulse bias power source;
5. The gasification system uses domestically produced or the import gaseous mass flowmeter, the gas flow amount control (demonstration) meter;
6. The electrically controlled system establishment electric circuit overloaded, cuts off the water supply, dies the acousto-optics alarm device;
7. Control system (touch-screen +PLC), real time display detailed parameter, completely automatic control entire production process, and automatic memory technological parameter.
PVD Coating Equipment - RTAC1618 Specifications
| MODEL | RTAC1618 | ||
| MATERIAL | Stainless Steel (S304) | ||
| CHAMBER SIZE | Φ1600*1800mm (H) | ||
| PUMP SYSTEM | Rotary Piston Vacuum Pump (Mechanical) | ||
| Rotary Vane Vacuum Pump (Holding) | |||
| Roots Vacuum Pump | |||
| Diffusion Pump | |||
| TECHNOLOGY | Ion Plating ( Multi-arc sources) | ||
| TYPICAL TARGETS | Chrome, Titanium, Zirconium, TiAl | ||
| GAS | Gas Mass Flow Meters ( Ar, N2,) Argon, Nitrogen | ||
| CONTROL | PLC(Programmable Logic Controller) | ||
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipment | ||
| COOLING | Recyle Cooling Water | ||
| HEATING | Heater, up to 300℃ | ||
| POWER MAX. | 150KW (Approx.) | ||
| AVERAGE POWER CONSUMPTION | 70KW (Approx.) | ||
Ceramic PVD Coating Equipment takes ion plating technology to evaporate solide metals like Titanium, Chrome by cathodic arc source and condense the ionized metals on product surface to generate the Nano thin film in high vacuum environment. With the reactive gas like: Nitrogen to generate various colors.
Other customized machine sizes are vailable based on specified product dimensions and capacity demand.
Model | RTAC-1008 | RTAC-1012 | RTAC-1215 | RTAC-1416 | RTAC-1618 | ||||||
| Chamber Inner size | 1000x800mm | 1000x1200mm | 1200x1500mm | 1400x1600mm | 1600x1600mm | ||||||
| Power supply type | Arc power supply, filament power supply, pulse bias power supply | ||||||||||
| Structure of vacuum chamber | Vertical front door structure, rear air exhaust system and double-layer water cooling chamber | ||||||||||
| Material of vacuum chamber | stainless steel 304/316L | ||||||||||
| Ultimate vacuum | 6.0x10-4Pa (unloading, clean, drying chamber) | ||||||||||
| Vacuum Pumping Speed | from atmosphere to 8.0*10-3Pa ≤15 minutes | ||||||||||
| Vacuum pumping system | Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump (the specific model can be selected according to customer requirements) | ||||||||||
| Arc source | 6 units or 8 units | 8 units or 10 units | 10 units or 12 units | 14 units or 16 units | 16 units or 18 units | ||||||
| Bias power supply | 20KW/set | 20KW/set | 30KW/set | 40KW/set | 50KW/set | ||||||
| Driving Model | Planetary revolution and rotation, variable frequency speed regulation (controllable and adjustable) | ||||||||||
| Heating System | Controllable and adjustable from room temperature to 450°C (PID temperature control) | ||||||||||
| MFC | 3-path or 4-path process gas flow control and display system, selective automatic gassing system | ||||||||||
| Cooling System | Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) | ||||||||||
| Control mode | Manual/automatic integration mode, touch screen operation, PLC or computer control | ||||||||||
| Total power | 30KW | 35KW | 45KW | 60KW | 75KW | ||||||
| Alarm and protection | Alarm water shortage, over current and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function | ||||||||||
| Equipment area | W2.5m*L3.5m | W3m*L4m | W4m*L5m | W4.5m*L6m | W5m*L7m | ||||||
| Other technical parameters | Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa | ||||||||||
| Remarks | The specific configuration of coating equipment can be designed according to process requirements of coating products | ||||||||||
Ceramic files PVD Coating Samples
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
