Vacuum coating machine
Vacuum coating machine adopts advanced PLC control, and is equipped with computer automatic shift vacuum gauge and 3 flow controllers. Invert arc power supply and computer PLD automatic temperature control.
Our equipment is widely used in ceramic,mosaic,hardware,clocks,mobile phones,electronics toys,decorations and other fields.
1. Plated tile gold or silver film is bright and delicate with fast coating.
2. Well-adapted, simple maintenance, stable work.
3. Non-standard special equipment design and manufacturing shall be based on customers’ product, production and specific requirements on film.
4. Magnetron target, medium frequency twin targets and etc can be installed additionally.
|TECHNOLOGY||DC magnetron sputtering + arc cathodes deposition|
|CHAMBER MATERIAL||Stainless Steel (S304)|
|CHAMBER SIZE||Φ1000*1000mm (H)|
|CHAMBER TYPE||Regular octahedron chamber, 2-doors|
|ROTATION RACK & JIG SYSTEM||6 (8)satellite, Max. weight: 400kgs|
|POWER SUPPLIES||Qty. of Sputtering: 2*24 KW Bias of Power Supply: 1*24W AE power supply for option Ion Source Power supply 2 sets, AE power supply for option|
|DEPOSITION MATERIAL||Ti, Au, Ag etc.|
2 pairs (4 pieces) Sputtering Cathodes + 2 Ion Source Coating Area: Dia800mm*H550mm;
Uniformity Area: ±10~15%
|CONTROL||PLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)|
|PUMP SYSTEM||Rotary Vane Pump: SV200 - 1 set (Leybold)|
|Roots Pump: WAU501 - 1 set (Leybold)|
|Holding Pump: D60C-1set- (Leybold)|
|Magnetric Rotor Suspension Molecular Pump: MAG2200 - 2 sets (Leybold)|
|GAS MASS FLOW CONTROLLER||3 channels, Made in America (MKS brand)|
|VACUUM GAUGE||Model: ZDF-X-LE, Made in China|
|Linear Ion Source||2 pieces Pre-treating, plasma cleaning + assisted deposition|
|SAFETY SYSTEM||Numerous safety interlocks to protect operators and equipment|
|HEATING||Heaters: 20KW. Max. temp.: 400℃|
|COOLING||Industrial Chiller (Cold Water)|
|POWER MAX.||100KW (Approx.)|
|AVERAGE POWER CONSUMPTION||45 KW (Approx.)|
|GROSS WEIGHT||T (Approx.)|
|FOOT PRINT||( L*W*H) 4000*4000 *4000 MM|
|POWER ELECTRICAL||AC 380V/3 phases/50HZ|
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.