Magnetron Sputtering Deposition System

  Photonics Sputter Deposition System For Hydrophobic Composition Film And Other Functional Films

Applications:

The RTSP1213 machine is a batch model sputtering system, can deposits various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonics products, aerospace and other new energy industries.

Properties:

To improve the conductivity of surface;

 High corrosion resistance;

 High wear resistance;

 High hardness

 Hydrophobic composition film and other functional films

Available for compound coatings: metallic and non-metallic films.

Film thickness range from 100nm to 12μm, thickness tolerance ±5%
 Strong adhesion.

 Low tempering parts surface hardening treatment.

Type:

Vertical orientation, polyhedron structure, 2-doors (front and back )

Features:

• Environmentally friendly system, no industrial waste water, air and noise pollution;
• Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
• Up to 10 processing recipes login and backup; high repeatability and diversity.
• Special design of Carousel system for high uniformity of film deposition.
• High productivity and high quality
• Stable and reliable system, running 365 days * 24hrs ( maintenance and repair breaking time)
• Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known Europe brand pumps
• Compact design occupy minimum installation space.

Technical Specifications

• Performance

1. Ultimate Vacuum Pressure: better than 8.0*10^-5 Pa;

• Base Vacuum pressure: 3.0*10^-4 Pa

3. Pumping down Time: from atm to 1.0×10^-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: balanced/unbalanced sputtering cathodes

5. Operating Model: Full Automatically /Semi-Auto/ Manually

6. Heating: from room temperature up to max. 450℃,

7. Plasma cleaning and Plasma assist deposition: Anode Linear Ion Source

8. Magnetic Closed - Loop filed. (Unbalance/balance cathodes)

9. Bias Power supply for glow discharging.

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size: Inner Diameter 1200mm

Inner Height: 1300mm

1.2 Material: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Sputtering Shield : SUS304

1.4 View Window: on chamber door - 4 sets ( 2 on each door)

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: SUS304 material

2. Roughing Vacuum Pumping System:

Oil rotary vane vacuum pump +Roots pump + Holding Pump ( Leybold)

3. High Vacuum Pumping System:

Magnetic Suspension Molecular Pump ( Leybold )

• Gate valves - 2 sets

4. Electrical Control and Operation System- PLC+ Touch Screen

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Sputtering Power Supply + Ion source power supply + Bias Power Supply ( Advanced Energy )

4.3 Sputtering deposition control system

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

Temperature measuring device: Thermocouple
MFC: Mass Flow Controller ( 4 ways), digital display mode-- Europe brand

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source: Sputtering cathodes, Ion source -- Europe brand

5.2 Deposition material: Carbon target

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

7.Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase 380V 50Hz(60Hz), 75kVA, average power consumption: 40KW

Installation Area: (L*W*H) 3000*4000*3200mm

Exhaust: Vent for mechanical pumps

Why us?

1. Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.

2. Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.

3. Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

To download the completed brochure, please click here:  R&D vacuum coating machine - PECVD + PVD depositio...