Automotive, Semiconductor, SiC Coating, DLC Film Deposition,
Range From 100 Nm To 12μm, Thickness Tolerance ±5%
Photonics Sputter Deposition System For Hydrophobic Composition Film And Other Functional Films
The RTSP1213 machine is a batch model sputtering system, can deposits various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonics products, aerospace and other new energy industries.
To improve the conductivity of surface;
High corrosion resistance;
High wear resistance;
Hydrophobic composition film and other functional films
Available for compound coatings: metallic and non-metallic films.
Film thickness range from 100nm to 12μm, thickness tolerance ±5%
Low tempering parts surface hardening treatment.
Vertical orientation, polyhedron structure, 2-doors (front and back )
Environmentally friendly system, no industrial waste water, air and noise pollution;
Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
Up to 10 processing recipes login and backup; high repeatability and diversity.
Special design of Carousel system for high uniformity of film deposition.
High productivity and high quality
Stable and reliable system, running 365 days * 24hrs ( maintenance and repair breaking time)
Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known Europe brand pumps
Compact design occupy minimum installation space.
1. Ultimate Vacuum Pressure: better than 8.0*10-5 Pa;
Base Vacuum pressure: 3.0*10-4 Pa
3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)
Power: 3 Phase 380V 50Hz(60Hz), 75kVA, average power consumption: 40KW
Installation Area: (L*W*H) 3000*4000*3200mm
Exhaust: Vent for mechanical pumps
Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.
Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.
Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.