Steel frame construction building materials Ion Plating System , Muil Arc Thin Film Coating Machine
The large size arc vacuum coating machine is widely used for big size furnitures, architectural building materials, SS sheets, SS plates, SS pipes, Ceramic and Glass, Crystal crafts etc.
For such series of large size vacuum coaters, we provide the whole plant design and total PVD coating service professional instructions.
Large size arc vacuum coating machine we have produced standard models as below
|Vacuum chamber Inner Size||Φ2100×H4000mm||Φ1800×H3600mm||Φ2000×H4000mm||Φ2200×L7000mm||Φ2000×L8000mm|
|Arc source||40-60 units||24-36 units||40-60 units||50~60 units||50~60 units|
|Bias Power Supply||60KW/1 set||50KW/1 set||60KW/1 set||70KW/1 set||70KW/1 set|
|Footprint||40~60m² *H12m||40~60m² *H11m||40~60m² * H12m||40~60m² *L20m||40~60m² *L22m|
|Power Supplies||DC power, pulsed power (bias power, arc power)|
|Vacuum Chamber||Vertical , top opening model ( Horizontal for Optional)||Horizontal, front opening model|
|Rack and Jig System||Planetary frame, revolution + rotation|
|Power source Type||Arc power supply, bombardment bios and heating power supply|
|Ultimate Vacuum Pressure||≤8×10-4pa,pressure rising rate≤0.67pa/h, Pump down time (exhaust speed) : from atom to 8x10-3 pa ≤20min|
|Vacuum Pumping System||Oil diffusion Pump+ Mechanical pump +Maintenance Pump + Roots Pump (the number of the pumps are designed according to customer’s need)|
|Control and Operation||Manual/semi-automatic , touch screen operation, PLC control|
|Cooling system||recycle water-cooling system|
|Cathodic Arc Source||Adjustable magnetron filed,indirect water cooling|
|Working Environment||Air Pressure 0.5-0.8MPa, Water Temp.≤25°C,Water Pressure≥0.2MPa|
|Heating System||Controllable and adjustable from room temperature to 300°C|
|Measuring Instrument||vacuum gauge,flow meter box,mass flow controller,electric control box,heated instrument control box, arc power control box|
|Remarks||Dimension of the vacuum chamber, the quantity of arc ion sources, heaters and pumps can be designed and equipped according to customers demand.|
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.