Closed Field Unbalanced Magnetron Sputtering System, CE Certified PVD Ion Plating Machine
1 set
Closed Field Unbalanced Magnetron Sputtering System,  CE Certified PVD  Ion Plating Machine
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Basic Infomation
Place of Origin: China
Brand Name: ROYAL
Certification: CE
Model Number: RTSP1000
High Light:

magnetron sputtering equipment


vacuum deposition equipment

Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 10~12 weeks
Supply Ability: 10 sets per month
Technology: Pulsed Closed Field Unbalanced Magnetron Sputtering
Targets: Ta, Ni, Cr, Ti, Au, Ag, SS, Cu, Zr, Al Etc.
Warranty: 12 Months, CE Certified
Coating: PVD Machine, Vacuum Coating
After-sales Service Provided: Engineers Available To Service Machinery Overseas, Maintenance And Repair Service, Installation, Commissioning And Training, Video Technical Support
Application: Industrial Massive Production, Lab R&D
Product Description


               Closed field unbalanced magnetron sputtering deposition system, Unbalanced Magnetron Sputtering Ion Plating




Unbalanced and closed field magnetron processes have all the advantages of planar magnetrons. Additional advantages and disadvantages are:

  • Additional ion bombardment resulting in dense, adherent films
  • Ion assist and substrate cleaning possible
  • Improved tribological, wear and corrosion resistant films
  • Amenable to multilayer, superlattice, nanolaminant and nanocomposite films
  • Poorer materials usage
  • More complex cathode configuration/expense

Unbalanced and closed field magnetron sputtering revolutionized properties achievable by magnetron sputtering processes. As successful with improved thin film tribological, corrosion resistance and optical properties as this technology was, improvements in magnetron technology had just begun. Next Blog we move onto rotating and cylindrical magnetron processes and resulting thin film applications.

                            --- Above Artical from  P E T E R       M A R T I N


Royal technology developed high yield and high target utilization sputtering cathodes, especially for rare and expensive metals sputtering:  Au Gold, Ta  Tantalum,  Ag silver metal films deposition.   The high uniformity film's deposition system have been serving several industries like Electronics parts, medical instruments components which require high film uniformity, multiple layers deposition. 



The RTSP1000 machine is a standardized machine developed by Royal technology. Extensive applied with cutting/forming tools, molds, medical  instruments, electronics components, automotive industries. 


RTSP1000 Main Configurations and Technical Parameters 
TECHNOLOGY  MF magnetron sputtering + ion source plasma cleaning
CHAMBER MATERIAL  Stainless Steel (S304)
CHAMBER SIZE  Φ1000*800mm (H)
ROTATION RACK & JIG SYSTEM  6 satellites Max. weight: 500kgs

Qty. of Sputtering: 2*24 KW Bias of Power Supply: 1*20W Ion Source Power supply 1*5KW

DEPOSITION MATERIAL  Ti/Cr/TiAl /Ta/Cu/Au/Carbon etc. 
DEPOSITION SOURCE   2 pairs (4 pieces) Planar Sputtering Cathodes +
1 Linear Ion Source
Uniformity Area: ±10~15%
CONTROL   PLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEM Rotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001- 1 set (Leybold)
Holding Pump: D60C- 1 set (Leybold)
Magnetic Suspension Molecular Pump - 1 set (Leybold)
GAS MASS FLOW CONTROLLER  4 channels, Made in China, Seven Star (CS series, ) digital model
VACUUM GAUGE  Model: ZDF-X-LE, Made in China: ZDF-X-LE 
LINEAR ION SOURCE 1 piece Pre-treating, plasma cleaning + assisted deposition 
SAFETY SYSTEM  Numerous safety interlocks to protect operators and equipment 
HEATING  Heaters: 30KW. Max. temp.: 450℃
COOLING  Industrial Chiller (Cold Water)
POWER MAX.  100KW (Approx.)
FOOT PRINT  ( L*W*H) 4000*4000 *3200 MM
POWER ELECTRICAL  AC 380V/3 phases/50HZ / 5 lines



High target utilization planar sputtering deposition:  please CLICK HERE to watch the video 

Closed Field Unbalanced Magnetron Sputtering System,  CE Certified PVD  Ion Plating Machine 0   Closed Field Unbalanced Magnetron Sputtering System,  CE Certified PVD  Ion Plating Machine 1



Linear Ion Source Plasma Cleaning and Assisted Deposition: please CLICK HERE to watch video



Closed Field Unbalanced Magnetron Sputtering System,  CE Certified PVD  Ion Plating Machine 2


Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.




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Contact Person : Ms. ZHOU XIN
Fax : 86-21-67740022
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