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PVD Nickle and Copper Sputtering Thin Film Coating Machine, Au Gold Conductive Film Deposition

Name: PVD Nickle and Copper Sputtering Thin Film Coating Machine, Au Gold Conductive Film Deposition
Brand: SHANGHAI ROYAL TECHNOLOGY INC.
SKU: RTAS
Availability: InStock

Brand Name:	ROYAL
Model Number:	RTAS
MOQ:	1 set
Price:	depends on
Payment Terms:	L/C, T/T
Supply Ability:	10 sets per month

Detail Information

Product Description

Detail Information

Place of Origin:

China

Certification:

Technology:

DC Magnetron Sputtering, PVD Sputtering Deposition, PVD Vacuum Coating

Applications:

Conductive Film Deposition, Corrosion Resistance Film Coating

Properties:

Robust And High Volume Design Machine

Sputtering Targets:

Ni, Cr, Cu, Au, Ag, Ta, Ti, SS, Al Etc. Pure Metals

Factory Location:

Shanghai City, China

Worldwide Service:

Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America

Training Service:

Machine Operation, Maintenance, Coating Process Recipes, Program

Warranty:

Limited Warranty 1 Year For Free, Whole Life For Machine

OEM & ODM:

Available, We Support Tailor Made Design And Fabrication

Packaging Details:

Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.

Highlight:

thin film coating equipment

dlc coating equipment

Product Description

Circuit Board Conductive Thin Film Deposition by PVD DC Sputtering Process, Copper plating, Au Sputteringdeposition

------Large Capacity, Flexible Modules Design, Precised Manufacturing.

Technical Advantages:

The DPC-RTAS1215+ Sputtering system is the upgraded version of the original ASC1215 model, the newest system has several advantages:

Higher Efficient Process:
1. Double sided coating is available by turnover fixture design
2. Up to 8 standard planar cathode flanges for multiple sources
3. Large capacity up to 2.2 ㎡ ceramic chips per cycle
4. Fully Automation, PLC+Touch Screen, ONE-touch control system

Lower Production Cost:
1. Equipped with 2 magnetic suspension molecular pumps, fast starting time, free maintenance;
2. Maximum heating power;
3. Octagonal shape of chamber for optimum space using, up to 8 arc sources and 4 sputtering cathodes for fast deposition of coatings

The DPC process- Direct Plating Copper is an advanced coating technology applied with LED and semiconductors in electronic industries. One typical application is Ceramic Radiating Substrate. Copper conductive film deposition on Aluminum Oxide (Al2O3), AlN substrates by PVD vacuum sputtering technology, has above all one big advantage compared to traditional manufacturing methods: DBC LTCC HTCC have much lower production costs.

Royal Technology’s team collaborated with our customer to develop the DPC process successfully applying PVD sputtering technology.

Applications of DPC:
HBLED
Substrates for solar concentrator cells
Power semiconductor packaging including automotive motor control
Hybrid and electric automobile power management electronics
Packages for RF
Microwave devices

Technical Specifications

Description	DPC-RTAS1215+
Chamber Height (mm)	1500
Chamber diameter (mm)	φ1200
Sputtering Cathodes Mounting Flange	4
Ion Source Mounting Flange	1
Arc Cathodes Mounting Flange	8
Satellites (mm)	16 x Φ150
Pulsed Bias Power (KW)	36
Sputtering Power (KW)	DC36 + MF36
Arc Power(KW)	8 x 5
Ion Source Power (KW)	5
Heating Power (KW)	36
Effective Coating Height (mm)	1020
Magnetic Suspension Molecular Pump	2 x 3300 L/S
Roots Pump	1 x 1000m³/h
Rotary Vane Pump	1 x 300m³/h
Holding Pump	1 x 60m³/h
Capacity	2.2 ㎡
Installation Area ( L x W x H) mm	420060003500

HMI + Touch Screen Operation System

PVD Nickle and Copper Sputtering Thin Film Coating Machine, Au Gold Conductive Film Deposition 0

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

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Glass Coating Machine

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PVD Chrome Vacuum Metal Deposition Machine

PVD Jet Black Coating Equipment

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products details

PVD Nickle and Copper Sputtering Thin Film Coating Machine, Au Gold Conductive Film Deposition

PVD Nickle and Copper Sputtering Thin Film Coating Machine, Au Gold Conductive Film Deposition

thin film coating equipment

dlc coating equipment