Tantalum Thin Film Magnetron Sputtering Deposition System Ta-C PVD Coating
1 set
Tantalum Thin Film Magnetron Sputtering Deposition System Ta-C PVD Coating
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Basic Infomation
Place of Origin: Made in China
Brand Name: ROYAL
Certification: CE
Model Number: RTSP1200
High Light:

Thin Film Magnetron Sputtering Deposition System


Tantalum Magnetron Sputtering Deposition System


Batch Coating Magnetron Sputtering System

Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 12~16 weeks
Payment Terms: L/C, T/T
Supply Ability: 8 sets per month
Model: Batch Coating System
Coating Films: Strong Adhesion, Low Coefficient Friction, Corrosion Resistance, High Dense And Uniformity.
Advantages: Large Capacity, Smart Design, High Uptime And High Yield, Low Cost Of Ownership, Short Cycle Times
Design: Octal Chamber, 4 Sputtering Cathodes, 1 Linear Ion Source
Product Description

Hydrogen Fuel Cell Vehicle Bipolar Plates Coating Plant, Carbon Based Coating Plant , Bipolar Plates Coating Equipment





FCV is the short name for Fuel Cell Vehicles, it is with the newest technology for next generation of green cars. It is 100% environmentally friendly and different from the primary battery such as dry cell and rechargeable battery that needs repeated charging.


The core technology is how to generate the electrical energy with fuel cell power modules through electrochemical reaction between hydrogen as fuel and oxygen. Scientists, engineers, professors from transportation organizations and worldwide vehicle manufactures have made thousands of tests and finally developed the proper processing.


Royal Technology has been working closely with customers in the past 3 years and successfully designed and fabricated high efficiency, commercialized and standardized sputtering deposition systems. We firmly believe that this technology will disrupt the vehicles industry.


Royal Technology's Solution on Bipolar Plates Coating


FC stack contains an array of catalyst coated membranes and stainless steel plates, called “bipolar plates”, the electrolyte membrane is key technology, this special coating to provide a low contact resistancce and to prevent corrosion throught the fuel cell's lifetime.


Equipment Structure:

Coating System Structure: Vertical orientation, octagonal structure, 2 doors for easy access.

Environmentally friendly system, no hazardous wastes.

Total integration, modular design
Commercialized and standardized for industrial mass production
Extremely efficient ion source for strong adhesion and high ionization.
Easy Operation: Touch screen + PLC control, one touch operation
Special design of Carousel system for high uniformity deposition.
High productivity and stability, working 24/7 a week.
Flexible, matches to various sizes of plates


Key components 

Tantalum Thin Film Magnetron Sputtering Deposition System Ta-C PVD Coating 0



Ion source for assisted depositon  process:


Tantalum Thin Film Magnetron Sputtering Deposition System Ta-C PVD Coating 1



Ion source for plasma iteching process:


Tantalum Thin Film Magnetron Sputtering Deposition System Ta-C PVD Coating 2


The RTFCV machine is a batch model sputtering system, which can deposit various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonic products, aerospace and other new energy industries.


Performances of the deposition films:


l To improve the conductivity of surface;

l High corrosion resistance;

l High wear resistance;

l High hardness

l Hydrophobic composition film and other functional films

l Available for compound coatings: metallic and non-metallic films.

l Film thickness range from 100nm to 12μm, thickness tolerance ±5%

l Strong adhesion.

l Low tempering parts surface hardening treatment.




Vertical orientation, octal structure, 2-doors (front and back)



Design advantages:

  • Environmentally friendly system, no industrial waste water, air and noise pollution;
  • Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
  • Up to 10 processing recipes login and backup; high repeatability and diversity.
  • Special design of Carousel system for high uniformity of film deposition.
  • High productivity and high quality
  • Stable and reliable system, running 365 days * 24hrs (maintenance and repair breaking time)
  • Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known European pump brands
  • Compact design occupy minimum installation space.


Contact us for more details. Royal Tech team is honored to serve you with our best service and  knowleage. 


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Contact Person : Ms. ZHOU XIN
Fax : 86-21-67740022
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