CsI950 High Vacuum Deposition System is exclusively designed for CsI and TII metallization on scintillation screens in an extremely high vacuum environment. The CsI scintillators 200～600µm in thickness ranges with high uniformity of thickness and brightness performance:
Ultra- High Spatial Resolution of Imaging;
Fast response for sharper imaging;
Class leading edge-to-edge image areas;
Optical absorb layers or reflector layers;
Low patient X-ray dose.
Substrates Applied: TFT glass, Fiber Optic Plate, Amorphous-carbon plate, Aluminum plate
Application: for security check and inspection, high energy physics education, nuclear radiaton detection and medical imagings: chest examination, mamography, dental inter oral and panoramic.
Royal Technology provides 2 models machine: CsI950 and CsI950A+
The model CsI950A+ is updated based on the 1st generation CsI950, its advantages:
-CsI-950A+ model is with 2-rotary rack structure based on Generation -one CsI-950 model.
-Double-capacity for max. size substrate: 500 x400mm.
2. Repeatability & Reproducibility
-Through high precised parameter control system,
-Automated process control software and program,
-User friendly operation.
-24/7 days non-stop operation;
-Inficon Film Thickness Controller to monitor the film thickness inline.
-Temperature control accuracy: ±1 ℃, multi-stage setting, automatic temperature data recording and control
-Rotary racks equipped with Servo-Motor for high accuracy and stability.
-High vacuum pump: Magnetic Suspension Molecular Pump, with nitrogen gas blowing device to avoid hazard material be exposed in the air;
-All electrodes are equipped with safety protection sleeves.
Deposition chamber (mm)
|φ950 x H1350||
φ950 x H1350
|Loading rotary racks||1||2|
Iodine tungsten lamp
Iodine tungsten lamp
|Ultimated vacuum pressure (Pa)||8.0×10-5Pa||8.0×10-5Pa|
|Magnetic Suspension Molecular Pump||1 x 3400L/S||
1 x 3400L/S
|Roots Pump||1 x 490m³/h||
1 x 490m³/h
|Rotary Vane Pump||1 x 300m³/h||
1 x 300m³/h
|Deposition Controller||Quartz Control x 1||
Quartz Control x 1
|Power Consumption (KW)||
Max. approx. 62
Average approx. 32
Max. approx. 65
Average approx. 35