PVD Ion plating/coating machine,Thin Film Coating Machine
It can be used to coat metal film, titanium nitride, titanium carbide, and zirconium nitride, chromium nitride and titanium, nickel, chromium, copper , and other compounds film, multi-layer super-hard film, nitrogen-doped titanium film and the alloy film ( TiN, TiC, TiCN, TiAlN, CrN, Cu, Au, Al2O3and other decorative films etc.) and in a very short time to complete all the machining process, it is a highly efficient multi-functional coating equipment.
This machine is extensively used in the fields of decorative coating for stainless steel, ceramic tile/cups, computer, mobile phone, watch& jewelry, sanitary, home appliance, hotel products etc.
It has the reliable work, good repeatability and consistency., fast deposition rate, high adhesion, fine film, etc. The coating film is dense and hardness with low friction coefficient, to keep the smoothness of original workpiece surface, good flexibility, hard to break and fall.
The equipment makes full automation of the coating technology come true. It uses the vacuum coating technique to coat on the surface of the base material. It has the features of low cost, high qualification rate, green environmental protection etc.
Thin Film Coating Machine Models
|Chamber Inner size||900x1100mm||1000x1200mm||1250x1350mm||1400x1600mm||1600x1600mm|
|Power supply type||Arc power supply, filament power supply, pulse bias power supply|
|Structure of vacuum chamber||Vertical front door structure, rear air exhaust system and double-layer water cooling chamber|
|Material of vacuum chamber||stainless steel 304/316L|
|Ultimate vacuum||6.0x10-4Pa (unloading, clean, drying chamber)|
|Vacuum Pumping Speed||from atmosphere to 8.0*10-3Pa ≤15 minutes|
|Vacuum pumping system||Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump
(the specific model can be selected according to customer requirements)
|Arc source||6 units or
|8 units or
|10 units or
|14 units or
|16 units or
|Bias power supply||20KW/set||20KW/set||30KW/set||40KW/set||50KW/set|
|Driving Model||Planetary revolution and rotation, variable frequency speed regulation
(controllable and adjustable)
|Heating System||Controllable and adjustable from room temperature to 450°C
(PID temperature control)
|MFC||3-path or 4-path process gas flow control and display system, selective automatic gassing system|
|Cooling System||Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)|
|Control mode||Manual/automatic integration mode, touch screen operation, PLC or computer control|
|Alarm and protection||Alarm water shortage, over current and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function|
|Other technical parameters||Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa|
|Remarks||The specific configuration of coating equipment can be designed according to process requirements of coating products|