PVD Functional Coatings- Gold Sputtering Thin Film Deposition System
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PVD Functional Coatings- Gold Sputtering Thin Film Deposition System
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Features
Basic Infomation
Place of Origin: Made in China
Brand Name: ROYAL
Certification: CE
Model Number: RTSP
High Light:

vacuum coating plant

,

high vacuum coating machine

Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 12 weeks
Payment Terms: L/C, T/T
Supply Ability: 5 sets per month
Specifications
Deposition Target: Au Gold, Copper Cu, Silver Ag, Ni And Cr Etc.
Applications: Glass Slide, Electronic Circuit Board, Medical Industries
Technology: DC/MF Magnetron Sputtering
Product Description

Applications 

 

 Gold has a bright, reddish-yellow color in its purest form. It does not oxidize in the air at room temperature, so it remains very stable under normal conditions and its electrical conductivity is constant. It is one of the most common precious metals used in finishing.

Gold is corrosion resistant, which makes it a good finish for connector pins and electrical switch contacts.

Gold plating is used in parts and components across a wide range of main industries:

  1. Medical applications: body implants
  2. Energy: hydrogen fuel cell Bipolar plates
  3. Semiconductor: microelectronic chips
  4. Aerospace & defense
  5. Telecommunications and other more

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ROYAL Technology supplies turnkey coating solutions for manufactures who are looking for a reliable team for long term cooperation.

Robust design, large batches, fast cycle, flexible coating processes are the basic design concepts ROYAL Team has been pursuing.

Design Advantages

  1. Energy saving: compact design and molecular pumps are applied
  2. High target utilization up to 40% with planar sputtering cathode
  3. Sputtered Au gold film’s thickness is controllable
  4. One-Touch operation system

PVD Gold sputtering deposition

  1. When comes to glass, metal alloys etc. Substrates material, the bonding layer is essential to enhance substrate and Aufilm adhesion. Royal Technology has developed a range of matured coating recipes based on different applications, support our customers with professional advice.
  2. The roughness (RMS – root mean square) < 40Å is expected for most of the applications. For certain scanning probe applications a lower roughness might be required, generally 1.5 ~ 4 nm.
  3. Gold sputtering layer surface purity: a clean surface is required for applications that employ gold surface modifications. Depending on the PVD process used, level of vacuum in the system, original purity of the gold source (over 99.99% generally)

     

    Technical Specifications:

    MODEL: RTSP800

    TECHNOLOGY: DC Sputtering + Ion source (for option)

    MATERIAL: Stainless Steel

    CHAMBER SIZE: Φ800*H800mm

    CHAMBER TYPE: Cylinder, vertical, 1-door

    ROTARY RACK SYSTEM: Planetary/Central driving

    DEPOSITION MATERIAL: Gold, Aluminum, Silver, Copper, Chrome, Stainless Steel, Nickel, Titanium

    DEPOSITION SOURCE: Planar Sputtering Cathodes,

    Conventional arc cathodes for option(according to the coating process’s requirement)

    REACTIVE GAS CONTROL: MFC, 2/4 ways

    CONTROL PLC(Programmable Logic Controller) +IPC

    PUMP SYSTEM:
    SV300B – 1 set (Leybold) 300m³/hr

    Roots Pump – 1 set, 490m³/hr

    Holding Pump – 1 set, 60m³/hr

    Turbo Molecular Pump: – 1 set, 3500L/S

    POWER SUPPLY: Bias power supply: 1*24 KW

    DC sputtering power: 12KW

    Linear Ion source: 5KW

    SAFETY SYSTEM:Numerous safety interlocks to protect operators and equipment

    COOLING Recycle: Cooling Water

    HEATING: Heaters, 9KW

    POWER ELECTRICAL:
    480V/3 phases/60HZ ( USA compliant)

    460V/3 phases/50HZ ( Asia compliant)

    380V/3 phases/50HZ ( EU-CE compliant)

    FOOTPRINT: L3200*W2600*H2000mm

    TOTAL WEIGHT: 4.0 T

    CYCLE TIME: 30~40 minutes (depending on substrate material, substrate geometry and environmental conditions)

    POWER MAX: 50KW

    AVERAGE POWER CONSUMPTION (APPROX.): 20KW

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Insite

 

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Please contact us for more information, we are always open to communicate and share with you the advanced techniques.

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Get in touch with us
Contact Person : Ms. ZHOU XIN
Fax : 86-21-67740022
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