MF Driving Vacuum Coater Components Anode Layer Plasma Sources Water Cooling
MF Driving Vacuum Coater Components Anode Layer Plasma Sources Water Cooling
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Basic Infomation
Place of Origin: MADE IN CHINA
Brand Name: ROYAL
Certification: ISO
Model Number: RTIS
High Light:

coating machine parts


helium leak detector

Payment & Shipping Terms
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Delivery Time: 2 weeks
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 100 sets per month
Applications: Anode Layer Plasma Sources Linear Ion Source On In-line System Plasma Assistant Deposition
Driving Model: MF
Cooling Model: Cooling Water
High Light: Reliable Water Cooling / High Voltage Withstanding
Lon: 50~800eV
Max. Discharge Voltage: 1500V
Product Description



      Anode Layer Plasma Sources


High Lights Applications:
  • reliable water cooling configuration
  • High voltage withstanding,
  • Contamination free design,
  • Excellent uniformity,
  • MF power supply driving mode.

R2R web coaters,

In-line deposition systems,

Batch coaters

For optical films, hard coatings, functional and decorative thin films, textiles plasma treatment.


Product ActiveGas-ALS (rectangular) ActiveGas-ALS (circular)
Max. discharge voltage 1500V 1500V
Max. discharge current >15mA/cm >15mA/cm
Ion energy 50~800eV 50~800eV
Operating pressure 5×10-2 ~1 Pa 5×10-2 ~1 Pa
Cooling water 5L/min 2L/min
Dimensions (mm) 145W@L<390 / 160W@L>400 ø114×130(H)




Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions


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Contact Person : Ms. ZHOU XIN
Fax : 86-21-67740022
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